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Feasible Analytical Solutions for Electrostatic Parallel-Plate Actuator or Sensor

Quantum Technologies, Inc., 17872 Cartwright Road, Irvine, CA 92614, USA

This paper presents several analytical solutions for the conventional electrostatic parallel-plate model and explains the effect of the quality factor decrease with the voltage applied. Such a model is of importance in the development of electrostatic (capacitive) sensors and actuators including acoustical transducers and loudspeakers, and micro/nanoelectromechanical systems (MEMS/NEMS). It serves to reveal and interpret the basic phenomena (in particular, the "pull-in" instability and "negative spring" effect) but there is still some room for new effects and analytical results, although the model is nonlinear and provides rather computational than comprehensible close-form relationships as "negative quality factor effect" described in this paper. The new results obtained can be supportive to analyze, test, and design electrostatic sensors and actuators.

Key Words: Electrostatic sensors/actuators • nonlinear vibratory system • analytical solution • quality factor

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